Session T1-2: Power Super-junction Devices

Prof. Wentong Zhang, University of Electronic Science and Technology of China, China

T1-2: 10:30-11:45, Oct. 22, 2024, Tuesday

Title: Power Super-junction Devices

Abstract:

Superjunction (SJ) is the most innovative voltage-sustaining layer (VSL) in the field of power semiconductor devices. It transforms conventional resistance-type VSL into junction-type VSL, breaking through the conventional “silicon limit” relationship between specific on-resistance Ron,sp and breakdown voltage VB, which was previously described by Ron,sp∝VB2.5. Instead, this relationship is now reduced to Ron,sp∝VB1.32 or even Ron,sp∝VB1.03, marking a significant milestone in the evolution of power semiconductor devices.
This speech provides an overview of the fundamentals of power semiconductor devices, focusing on the theory, technology, and experiments related to SJ devices. Topics include the principles of charge field modulation, electric field distribution within SJ structures, non-full-depletion mode, equivalent substrate model, optimization methods for minimizing Ron,sp, and an overview of the development of SJ device structures. Furthermore, the presentation explores an innovative concept of homogenization field (HOF) VSLs, which extends the charge balance mechanism pioneered in SJ devices, along with its latest advancements in theoretical and experimental research.

Biography:

Wentong Zhang has been involved in the field of power semiconductor devices and power integration technology. He has led or participated in over ten projects funded by the National Natural Science Foundation of China, including both general and youth programs, as well as major national science and technology projects. He has been honored with awards such as the Second Prize of the Ministry of Industry and Information Technology for Technological Invention, the Second Prize for China Industry-Academia-Research Cooperation Innovation Achievement, and the Excellent Doctoral Dissertation Award from the Chinese Institute of Electronics. Additionally, he has been selected to participate in the National Young Talent Program.