The ICSICT-2022 conference is the 16th in the series aiming to provide an international forum for the presentation and discussion of recent advances in solid-state and integrated circuit technology. The conference will be held on Oct. 25 - 28, 2022. Due to the concerns of the global covid-19 pandemic, this year's ICSICT is very special and forced to be held as a virtual conference. All aspects of solid-state devices, circuits, processing technologies, materials and other related research area are within the scope of the conference. The four days of contributed and invited presentations on the latest developments in diverse fields given in oral and poster sessions, panel discussions on leading edge technology issues, and other activities will provide extensive opportunities for technical information exchange as well as a stimulating environment for mutual communication among participants. Excellent Student and Outstanding Young Scholar Paper Awards will be presented at the closing of the conference.